Patent Assignment
Reel/Frame 020706/0076
Assignment of Assignor's Interest
Recorded: 2008-03-26
Pages: 2
Assignor
YAMAZAKI, SHUNPEI
Executed: 2008-03-06
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Manufacturing Method of Semiconductor Substrate and Manufacturing Method of Semiconductor Device