Patent Assignment
Reel/Frame 020707/0559
Assignment of Assignor's Interest
Recorded: 2008-03-26
Pages: 2
Assignee
NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY
NO. 43, SEC.4, KEELUNG RD., DA-AN DISTRICT, TAIPEI CITY, 106, TAIWAN
Covered Property
(1)
Method of Analyzing Effective Polishing Frequency and Number of Polishing Times on Polishing Pads Having Different Patterns and Profiles