Patent Assignment
Reel/Frame 020711/0031
Assignment of Assignor's Interest
Recorded: 2008-03-18
Pages: 4
Assignors
TAKIGUCHI, YASUSHI
Executed: 2008-03-10
YAMAMOTO, TARO
Executed: 2008-03-10
FUJIMOTO, AKIHIRO
Executed: 2008-03-10
NISHIKIDO, SHUUICHI
Executed: 2008-03-10
KUMAGAI, DAI
Executed: 2008-03-10
YOSHITAKA, NAOTO
Executed: 2008-03-10
KITANO, TAKAHIRO
Executed: 2008-03-10
TOKUNAGA, YOICHI
Executed: 2008-03-10
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium