Patent Assignment
Reel/Frame 020712/0711
Assignment of Assignor's Interest
Recorded: 2008-03-27
Pages: 4
Assignors
KOSHIMIZU, CHISHIO
Executed: 2008-02-22
MATSUMOTO, NAOKI
Executed: 2008-02-22
TANAKA, SATOSHI
Executed: 2008-02-22
ITO, TORU
Executed: 2008-02-22
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Plasma Processing Apparatus