Patent Assignment
Reel/Frame 020715/0395
Assignment of Assignor's Interest
Recorded: 2008-03-27
Pages: 4
Assignors
TIAN, XINKANG
Executed: 2008-03-25
MADRIAGA, MANUEL
Executed: 2008-03-26
MENG, CHING-LING
Executed: 2008-03-27
MIHALOV, MIHAIL
Executed: 2008-03-25
Assignee
TOKYO ELECTRON LIMITED
2953 BUNKER HILL LANE SUITE 301, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Apparatus for Designing an Optical Metrology System Optimized with Signal Criteria