Patent Assignment
Reel/Frame 020718/0817
Assignment of Assignor's Interest
Recorded: 2008-03-28
Pages: 8
Assignors
LIU, WEI
Executed: 2008-02-08
SWENBERG, JOHANES
Executed: 2008-02-07
NGUYEN, HANH D.
Executed: 2008-02-11
NGUYEN, SON T.
Executed: 2008-02-11
CURTIS, ROGER
Executed: 2008-02-08
BOTTINI, PHILIP A.
Executed: 2008-02-07
MARK, MICHAEL J.
Executed: 2008-02-06
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Apparatus and Method for Controlling Edge Performance in an Inductively Coupled Plasma Chamber