Patent Assignment
Reel/Frame 020725/0787
Assignment of Assignor's Interest
Recorded: 2008-03-27
Pages: 4
Assignor
HILL, HENRY A.
Executed: 2008-03-19
Assignee
ZYGO CORPORATION
21 LAUREL BROOK ROAD, MIDDLEFIELD, CONNECTICUT, 06455-0448
Covered Property
(1)
Distance Measuring Interferometer and Encoder Metrology Systems for Use in Lithography Tools