Patent Assignment
Reel/Frame 020728/0158
Assignment of Assignor's Interest
Recorded: 2008-03-31
Pages: 3
Assignor
SATO, KENJI
Executed: 2008-03-14
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Plasma Processing Apparatus, Radio Frequency Generator and Correction Method Therefor