Patent Assignment
Reel/Frame 020734/0613
Assignment of Assignor's Interest
Recorded: 2008-04-01
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
In-Situ Hybrid Deposition of High Dielectric Constant Films Using Atomic Layer Deposition and Chemical Vapor Deposition