Patent Assignment
Reel/Frame 020746/0007
Assignment of Assignor's Interest
Recorded: 2008-04-02
Pages: 4
Assignors
SUN, JENNIFER Y
Executed: 2008-03-13
XU, LI
Executed: 2008-03-13
COLLINS, KENNETH S
Executed: 2008-03-19
GRAVES, THOMAS
Executed: 2008-03-12
DUAN, REN-GUAN
Executed: 2008-03-12
THACH, SENH
Executed: 2008-03-13
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Erosion-Resistant Plasma Chamber Components Comprising a Metal Base Structure with an Overlying Thermal Oxidation Coating