Patent Assignment
Reel/Frame 020784/0163
Assignment of Assignor's Interest
Recorded: 2008-04-10
Pages: 3
Assignors
HATAKEYAMA, JUN
Executed: 2008-02-18
YOSHIHARA, TAKAO
Executed: 2008-02-18
KINSHO, TAKESHI
Executed: 2008-02-18
HASEGAWA, KOJI
Executed: 2008-02-18
KAWAI, YOSHIO
Executed: 2008-02-18
TAKEMURA, KATSUYA
Executed: 2008-02-18
Assignee
SHIN-ETSU CHEMICAL CO., LTD
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Patterning Process and Resist Composition