Patent Assignment
Reel/Frame 020785/0403
Assignment of Assignor's Interest
Recorded: 2008-04-10
Pages: 7
Assignors
QIU, HUATAN
Executed: 2008-03-26
CHUNG, WOODY
Executed: 2008-03-26
GUHA, ANIRBAN
Executed: 2008-03-26
CHEUNG, DAVID
Executed: 2008-03-26
Assignee
NOVELLUS SYSTEMS, INC.
4000 N. FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Gas Flow Distribution Receptacles, Plasma Generator Systems, and Methods for Performing Plasma Stripping Processes