Patent Assignment
Reel/Frame 020785/0620
Assignment of Assignor's Interest
Recorded: 2008-04-10
Pages: 2
Assignors
TSUKIHARA, MITSUKUNI
Executed: 2008-04-07
YAGITA, TAKANORI
Executed: 2008-04-07
AMANO, YOSHITAKA
Executed: 2008-04-07
KABASAWA, MITSUAKI
Executed: 2008-04-07
Assignee
SEN CORPORATION AN SHI AND AXCELIS COMPANY
10-1, YOGA 4-CHOME, SETAGAYA-KU, TOKYO, JAPAN
Covered Property
(1)
Ion Implantation Apparatus and Method of Converging/Shaping Ion Beam Used Therefor