Patent Assignment
Reel/Frame 020791/0519
Assignment of Assignor's Interest
Recorded: 2008-04-11
Pages: 15
Assignors
EHM, DIRK HEINRICH
Executed: 2007-10-18
VAN DE RUNSTRAAT, ANNEMIEKE
Executed: 2008-03-08
WOLSCHRIJN, BASTIAAN THEODOOR
Executed: 2008-01-09
STORM, ARNOLDUS JAN
Executed: 2008-03-17
STEIN, THOMAS
Executed: 2007-10-17
MEIJERINK, MARCO G. H.
Executed: 2007-10-17
BASTEIN, A. G. TON M.
Executed: 2007-10-25
VAN SOEST-VERCAMMEN, ESTHER L. J.
Executed: 2007-10-25
KOSTER, NORBERTUS BENEDICTUS
Executed: 2007-10-25
GUBBELS, FRITS G. H. M.
Executed: 2007-10-17
OPREL, PETER J.
Executed: 2007-10-16
NIENOORD, MICHIEL
Executed: 2007-10-23
RIEPEN, MICHEL
Executed: 2007-10-18
MOORS, JOHANNES HUBERTUS JOSEPHINA
Executed: 2008-04-01
Assignees
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, 5504DR, NETHERLANDS
Covered Property
(1)
Optical Arrangement and Euv Lithography Device with at Least One Heated Optical Element, Operating Methods, and Methods for Cleaning as Well as for Providing an Optical Element
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.