Patent Assignment
Reel/Frame 020809/0590
Assignment of Assignor's Interest
Recorded: 2008-04-16
Pages: 2
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Element with an Antireflection Coating, Projection Objective, and Exposure Apparatus Comprising Such an Element
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.