Patent Assignment
Reel/Frame 020830/0018
Assignment of Assignor's Interest
Recorded: 2008-04-17
Pages: 3
Assignor
TAKAHASHI, SATOSHI
Executed: 2008-04-17
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO, 206-0025, JAPAN
Covered Property
(1)
Substrate-Supporting Device Having Continuous Concavity