Patent Assignment
Reel/Frame 020833/0852
Assignment of Assignor's Interest
Recorded: 2008-04-11
Pages: 3
Assignors
TAKAHASHI, GORO
Executed: 2008-03-14
INOUE, HISASHI
Executed: 2008-03-11
KANDA, SHOICHI
Executed: 2008-04-02
WANG, WENLILNG
Executed: 2008-03-12
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Heat Processing Apparatus, Method of Automatically Tuning Control Constants, and Storage Medium