Patent Assignment
Reel/Frame 020836/0295
Assignment of Assignor's Interest
Recorded: 2008-04-22
Pages: 7
Assignors
PATRICK, ROGER
Executed: 2008-03-13
DHINDSA, RAJ
Executed: 2008-03-19
BETTENCOURT, GREG
Executed: 2008-03-17
MARAKHTANOV, ALEXEI
Executed: 2008-03-19
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREEMONT, CALIFORNIA, 94538-6401
Covered Property
(1)
Electrode Assembly and Plasma Processing Chamber Utilizing Thermally Conductive Gasket