Patent Assignment
Reel/Frame 020836/0860
Assignment of Assignor's Interest
Recorded: 2008-04-22
Pages: 2
Assignor
GOEHNERMEIER, AKSEL
Executed: 2008-02-26
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Exposure Method and Projection Exposure System Therefor
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.