Patent Assignment
Reel/Frame 020842/0822
Assignment of Assignor's Interest
Recorded: 2008-04-23
Pages: 4
Assignors
KIRCHNER, ANDREAS
Executed: 2004-04-21
KNEER, BERNHARD
Executed: 2004-05-04
MANN, HANS-JUERGEN
Executed: 2004-05-07
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STR. 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Method for Distortion Correction in a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.