Patent Assignment
Reel/Frame 020851/0071
Assignment of Assignor's Interest
Recorded: 2008-04-23
Pages: 4
Assignors
IIDA, TSUKASA
Executed: 2008-03-10
YONEDA, AKIHIKO
Executed: 2008-03-10
INOSHIMA, KAORI
Executed: 2008-03-10
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.