Patent Assignment
Reel/Frame 020853/0393
Assignment of Assignor's Interest
Recorded: 2008-04-18
Pages: 5
Assignors
HEMBACHER, STEFAN
Executed: 2008-03-12
GELLRICH, BERNHARD
Executed: 2008-03-06
KUGLER, JENS
Executed: 2008-03-06
BLEIDISTEL, SASCHA
Executed: 2007-03-07
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STR. 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Optical imaging device and method for reducing dynamic fluctuations in pressure difference
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.