Patent Assignment
Reel/Frame 020854/0007
Assignment of Assignor's Interest
Recorded: 2008-04-11
Pages: 3
Assignor
MATSUMOTO, KAZUHISA
Executed: 2008-01-22
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Method of Substrate Processing, Substrate Processing System, and Storage Medium