Patent Assignment
Reel/Frame 020857/0440
Assignment of Assignor's Interest
Recorded: 2008-04-25
Pages: 4
Assignors
TAKESHITA, MITSUNORI
Executed: 2006-10-16
MATSUDA, TOMOYUKI
Executed: 2006-10-16
HIRANO, MITSUHIRO
Executed: 2006-10-16
SATO, AKIHIRO
Executed: 2006-10-16
MORITA, SHINYA
Executed: 2006-10-16
MIYATA, TOSHIMITSU
Executed: 2006-10-23
SHIBATA, KOJI
Executed: 2006-10-16
Assignee
HITACHI KOKUSAI ELECTRIC INC.
4-14-1 SOTOKANDA, CHIYODA-KU,, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Manufacturing Method for a Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.