Patent Assignment
Reel/Frame 020857/0489
Assignment of Assignor's Interest
Recorded: 2008-04-25
Pages: 5
Assignors
DODOC, AURELIAN
Executed: 2008-04-07
BEDER, SUSANNE
Executed: 2008-03-28
CLAUSS, WILFRIED
Executed: 2008-03-27
TOTZECK, MICHAEL
Executed: 2008-04-01
FELDMANN, HEIKO
Executed: 2008-04-14
KRAEHMER, DANIEL
Executed: 2008-03-31
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination System or Projection Lens of a Microlithographic Exposure System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.