Patent Assignment
Reel/Frame 020866/0609
Assignment of Assignor's Interest
Recorded: 2008-04-29
Pages: 6
Assignors
SINGER, WOLFGANG
Executed: 2003-10-07
EGLE, WILHELM
Executed: 2003-09-30
WEISS, MARKUS
Executed: 2003-09-26
HAINZ, JOACHIM
Executed: 2003-09-24
WIETZORREK, JOCHEN
Executed: 2003-09-25
MELZER, FRANK
Executed: 2003-09-25
WANGLER, JOHANNES
Executed: 2003-10-06
Assignee
CARL-ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Collector Having Unused Region for Illumination Systems Using a Wavelength Less Than or Equal to 193 Nm
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.