Patent Assignment
Reel/Frame 020916/0272
Assignment of Assignor's Interest
Recorded: 2008-05-07
Pages: 6
Assignors
WONG, SCOTT
Executed: 2008-04-30
LIN, JEFFREY
Executed: 2008-05-07
BAILEY, ANDREW D., III
Executed: 2008-05-01
CHEN, JACK
Executed: 2008-05-06
MOORING, BENJAMIN W.
Executed: 2008-04-30
HUANG, CHUNG HO
Executed: 2008-05-02
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Dynamic Alignment of Wafers Using Compensation Values Obtained Through a Series of Wafer Movements