Patent Assignment
Reel/Frame 020924/0247
Assignment of Assignor's Interest
Recorded: 2008-05-02
Pages: 3
Assignor
YAMAGA, KENICHI
Executed: 2008-03-25
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5 CHROME, MIATO-KU, TOKYO, 1078481, JAPAN
Covered Property
(1)
Heating Apparatus for Heating Objects to Be Heated, Heating Method for Heating the Objects to Be Heated, and Storage Medium in Which Computer-Readable Program Is Stored