Patent Assignment
Reel/Frame 020927/0683
Assignment of Assignor's Interest
Recorded: 2008-05-02
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Heat System, Heat Method, and Program