Patent Assignment
Reel/Frame 020949/0243
Assignment of Assignor's Interest
Recorded: 2008-05-15
Pages: 3
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Microlithographic Projection Exposure Apparatus and Method for Producing Microstructured Components
Application:
12/054,991 →
Publication:
US 2008/0204692
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.