Assignment of Assignor's Interest

Recorded: 2008-05-15 Pages: 2

Assignor

FIOLKA, DAMIAN

Executed: 2008-04-30

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Illumination System of a Microlithographic Projection Exposure Apparatus

Patent: 8,031,327 →

Application: 12/058,993 →

Publication: US 2008/0266540

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.