Assignment of Assignor's Interest

Recorded: 2008-05-28 Pages: 6

Assignors

BACK, STEPHAN

Executed: 2008-05-08

SOYEZ, GUIDO

Executed: 2008-05-13

BUECHELE, JOACHIM

Executed: 2008-05-09

MUEHLPFORDT, ANNETTE

Executed: 2008-05-08

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Method for Setting an Optical Imaging Property in a Microlithographic Projection Exposure Apparatus, and Projection Exposure Apparatus of This Type

Application: 12/044,743 →

Publication: US 2008/0218716

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.