Patent Assignment
Reel/Frame 021011/0981
Assignment of Assignor's Interest
Recorded: 2008-05-28
Pages: 3
Assignors
FANG, TONG
Executed: 2008-05-22
KIM, YUNSANG
Executed: 2008-05-22
KIM, KEECHAN
Executed: 2008-05-22
STOJAKOVIC, GEORGE
Executed: 2008-05-22
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Control of Bevel Etch Film Profile Using Plasma Exclusion Zone Rings Larger Than the Wafer Diameter