Patent Assignment
Reel/Frame 021012/0808
Assignment of Assignor's Interest
Recorded: 2008-05-29
Pages: 5
Assignors
TIAN, CAIZHONG
Executed: 2008-04-01
NISHIZUKA, TETSUYA
Executed: 2008-04-01
NOZAWA, TOSHIHISA
Executed: 2008-04-01
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus