Patent Assignment
Reel/Frame 021015/0008
Assignment of Assignor's Interest
Recorded: 2008-05-29
Pages: 10
Assignors
SHANNON, STEVEN C.
Executed: 2008-05-15
RAMASWAMY, KARTIK
Executed: 2008-05-15
HOFFMAN, DANIEL J.
Executed: 2008-05-13
MILLER, MATTHEW L.
Executed: 2008-05-13
COLLINS, KENNETH S.
Executed: 2008-05-23
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Plasma Reactor with Plasma Load Impedance Tuning for Engineered Transients by Synchronized Modulation of a Source Power or Bias Power Rf Generator