Patent Assignment
Reel/Frame 021016/0440
Assignment of Assignor's Interest
Recorded: 2008-05-29
Pages: 10
Assignors
SHANNON, STEVEN C.
Executed: 2008-05-15
RAMASWAMY, KARTIK
Executed: 2008-05-15
HOFFMAN, DANIEL J.
Executed: 2008-05-13
MILLER, MATTHEW L.
Executed: 2008-05-13
COLLINS, KENNETH S.
Executed: 2008-05-23
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method of Plasma Load Impedance Tuning by Modulation of an Unmatched Low Power Rf Generator