Patent Assignment
Reel/Frame 021017/0245
Assignment of Assignor's Interest
Recorded: 2008-05-29
Pages: 3
Assignee
NOVELLUS SYSTEMS, INC.
3970 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
High Throughput Method of in Transit Wafer Position Correction in System Using Multiple Robots