Patent Assignment
Reel/Frame 021020/0838
Assignment of Assignor's Interest
Recorded: 2008-05-30
Pages: 7
Assignors
SCHWERTNER, TILMAN
Executed: 2008-05-15
BINGEL, ULRICH
Executed: 2008-05-15
LIMBACH, GUIDO
Executed: 2008-05-16
KALLER, JULIAN
Executed: 2008-05-16
SCHERLE, HANS-JUERGEN
Executed: 2008-05-15
KUGLER, JENS
Executed: 2008-05-19
SCHAFFER, DIRK
Executed: 2008-05-26
GELLRICH, BERNHARD
Executed: 2008-05-27
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Element Unit for Exposure Processes Having Sealing Element
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.