Patent Assignment
Reel/Frame 021034/0292
Assignment of Assignor's Interest
Recorded: 2008-06-03
Pages: 4
Assignors
OSSMANN, JENS
Executed: 2008-05-26
ENDRES, MARTIN
Executed: 2008-05-15
STUETZLE, RALF
Executed: 2008-05-15
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Exposure Apparatus for Microlithography
Application:
12/103,185 →
Publication:
US 2008/0259303
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.