Patent Assignment
Reel/Frame 021037/0009
Assignment of Assignor's Interest
Recorded: 2008-05-23
Pages: 3
Assignors
TADA, MUNEHIRO
Executed: 2008-05-20
FURUTAKE, NAOYA
Executed: 2008-05-20
TAKEUCHI, TSUNEO
Executed: 2008-05-20
HAYASHI, YOSHIHIRO
Executed: 2008-05-20
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Formation Method of Porous Insulating Film, Manufacturing Apparatus of Semiconductor Device, Manufacturing Method of Semiconductor Device, and Semiconductor Device
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.