Patent Assignment
Reel/Frame 021084/0074
Assignment of Assignor's Interest
Recorded: 2008-06-09
Pages: 2
Assignors
EMER, WOLFGANG
Executed: 2007-12-13
HAIDNER, HELMUT
Executed: 2007-12-11
WEGMANN, ULRICH
Executed: 2008-01-08
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Methods and Apparatus for Measuring Wavefronts and for Determining Scattered Light, and Related Devices and Manufacturing Methods
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.