Patent Assignment
Reel/Frame 021090/0235
Assignment of Assignor's Interest
Recorded: 2008-06-03
Pages: 3
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Substrate for Manufacturing Semiconductor Device and Manufacturing Method Thereof