Patent Assignment
Reel/Frame 021102/0228
Assignment of Assignor's Interest
Recorded: 2008-06-16
Pages: 6
Assignors
KATZ, DAN
Executed: 2007-10-24
PALAGASHVILI, DAVID
Executed: 2007-10-23
WILLWERTH, MICHAEL D.
Executed: 2007-10-25
TODOROW, VALENTIN N.
Executed: 2007-10-23
PATERSON, ALEXANDER M.
Executed: 2007-10-29
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method of Processing a Workpiece in a Plasma Reactor with Independent Wafer Edge Process Gas Injection