Patent Assignment
Reel/Frame 021112/0236
Assignment of Assignor's Interest
Recorded: 2008-06-17
Pages: 3
Assignee
ASM INTERNATIONAL N.V.
JAN VAN EYCKLAAN 10, BILTHOVEN, 3723 BC, NETHERLANDS
Covered Property
(1)
Modification of Nanoimprint Lithography Templates by Atomic Layer Deposition