Patent Assignment
Reel/Frame 021115/0788
Assignment of Assignor's Interest
Recorded: 2008-06-18
Pages: 4
Assignors
TIAN, XINKANG
Executed: 2008-06-17
MADRIAGA, MANUEL
Executed: 2008-06-17
MENG, CHING-LING
Executed: 2008-06-18
MIHAYLOV, MIHAIL
Executed: 2008-06-18
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU TOKYO, 107-8481, JAPAN
Covered Property
(1)
Automated Process Control Using an Optical Metrology System Optimized with Design Goals