Patent Assignment
Reel/Frame 021149/0625
Assignment of Assignor's Interest
Recorded: 2008-06-13
Pages: 3
Assignors
MURAKAMI, SATOSHI
Executed: 2008-05-27
GODO, HIROMICHI
Executed: 2008-05-28
ISOBE, ATSUO
Executed: 2008-05-27
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Manufacturing Method of a Semiconductor Substrate Using a Damaged Region