Patent Assignment
Reel/Frame 021162/0483
Assignment of Assignor's Interest
Recorded: 2008-06-23
Pages: 3
Assignors
KUSS, MATTHIAS
Executed: 2007-12-12
FIOLKA, DAMIAN
Executed: 2007-12-19
REISINGER, GERD
Executed: 2008-01-07
MAUL, MANFRED
Executed: 2007-12-19
DAVYDENKO, VLADIMIR
Executed: 2008-01-08
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Projection Exposure System, Beam Delivery System and Method of Generating a Beam of Light
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.