Assignment of Assignor's Interest

Recorded: 2008-06-30 Pages: 3

Assignors

KIM, MIN-KYUNG

Executed: 2008-05-22

KIM, MOO-SUNG

Executed: 2008-05-22

YANG, SANG-HYUN

Executed: 2008-05-22

LEI, XINJIAN

Executed: 2008-06-05

Assignee

AIR PRODUCTS AND CHEMICALS, INC.

7201 HAMILTON BLVD., PATENT DEPT., ALLENTOWN, PENNSYLVANIA, 18195-1501

Covered Property (1)

Plasma enhanced cyclic deposition method of metal silicon nitride film

Application: 12/157,631 →

Publication: US 2008/0318443

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.