Patent Assignment
Reel/Frame 021189/0898
Assignment of Assignor's Interest
Recorded: 2008-07-02
Pages: 12
Assignors
MIEHER, WALTER D.
Executed: 2004-06-11
LEVY, ADY
Executed: 2004-06-14
GOLOVANEVSKY, BORIS
Executed: 2004-07-12
FRIEDMANN, MICHAEL
Executed: 2004-06-11
SMITH, IAN
Executed: 2004-06-14
ADEL, MICHEL E.
Executed: 2004-07-11
FABRIKANT, ANATOLY
Executed: 2004-06-11
BEVIS, CHRISTOPHER F.
Executed: 2004-06-10
GHINOVKER, MARK
Executed: 2004-07-12
Assignee
KLA-TENCOR TECHNOLOGIES CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Apparatus and Methods for Detecting Overlay Errors Using Scatterometry
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.