Patent Assignment
Reel/Frame 021196/0233
Assignment of Assignor's Interest
Recorded: 2008-07-03
Pages: 4
Assignors
GREIF-WUESTENBECKER, JOERN
Executed: 2008-03-18
BOEHME, BEATE
Executed: 2008-02-21
STROESSNER, ULRICH
Executed: 2008-04-07
TOTZECK, MICHAEL
Executed: 2008-02-13
KAMENOV, VLADIMIR
Executed: 2008-02-13
DITTMANN, OLAF
Executed: 2008-02-14
KRAEHMER, DANIEL
Executed: 2008-02-13
GRUNER, TORALF
Executed: 2008-02-14
GEH, BERND
Executed: 2008-04-15
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Method for Determining Intensity Distribution in the Image Plane of a Projection Exposure Arrangement
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.